• MW-960

MW-960

E&R MW-960

MW-960 is a versatile plasma processing system for IC assembly applications. Either slotted or slot-less magazines can be performed for various processes.

  • Applications

    • Surface cleaning and activation prior to epoxy molding

    • Surface cleaning and activation prior to wire bonding

    • Surface cleaning and activation prior to underfill dispensing

    • Surface cleaning and activation prior to solder ball attach

    • Anti-tackiness treatment

  • Features

    • Microwave power supply generates high density plasma species to enhance the processing speed.

    • Electrode-free plasma source to eliminate the risk of electrostatic damage(ESD).

    • Pulse mode operation can reduce the processing temperature.

    • Rotating rack enhance the process uniformity.

    • Plasma species trapped at both sides of slotted magazines enhanced the high yield of underfill dispensing.