Silicon oxide deposition
LED lighting employed in the automobile is more and more popular. Stable operation and long lifetime is essential demands for LED lighting, especially employed in the severe outdoor environment, due to the safety concern.
Silicon oxide, SiOx, deposited within interlayer of LED package can prevent the moisture and sulfur-contained air from degrading the LED brightness gradually.
E&R’s PECVD system can deposit silicon oxide at the high rate, with controllable film hardness. Unlike silicon oxide deposited by silane(SiH4) or TEOS, E&R’s PECVD system uses HMDSO as the precursor, which is a more safer and cost-effective chemical.