Glass cavity/frame

The same via forming technology can be extended to produce glass cavity/cap, glass spacer and glass frame.

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Interposer, cavity/cap, spacer and frame are the essential glass components to fabricate :

  • MEMS sensor : Accelerator, Gyroscope, Resonate

  • RF switch

  • wafer-level optics(WLO) : Zoom lens, 3D sensing