MW-700
700x700 mm Panel Level MW Plasma Cleaning
MW-700 is a fully automatic in-line plasma processing system for panel level applications. With the working area up to 700 x 700mm, it is optimized for processing the large panel like fan-out panel or FPCB/PCB sheet.
- Application
- Surface cleaning and activation prior to epoxy molding
- Surface cleaning and activation prior to lamination of the insulation film
- Thinning the polymer film, e.g. ABF, PI, etc.
- Residue removal of Epoxy Molding Compound (EMC) after laser drilling, plasma de-smear
- Residue removal of photoresist or polymer
- Feature
- Microwave power supply generates high density plasma species to enhance the processing speed
- Electrode-free plasma source to eliminate the risk of electrostatic damage. (ESD)
- Pulse mode operation can reduce the processing temperature
- Loading/unloading modules selectable to accommodate AGV, conveyor or robot transfer system
- Automation, SECS/GEM, is available as an option