• Plasmax – 800 C

Plasmax – 800 C

Chamber / Batch Type Plasma Clean Machine

Plasmax 800 Series is specially designed for ion bombardment cleaning application. Based on the plasma source and throttle valves, there are four tools for various requirement.

Model
 Plasma Source
 Frequency
 Throttle Valve
 Flow Control
Plasmax 800II
 RF
 13.56MHz
 W/ Throttle Valve
 MFC
Plasmax 800III
 LF
 100KHz
 W/ Throttle Valve
 MFC
Plasmax 800CH
 RF
 13.56MHz
 W/O Throttle Valve
 MPC
Plasmax 800C
 LF
 100KHz
 W/O Throttle Valve
 MPC

  • Application
    • Surface cleaning and activation prior to epoxy molding
    • Surface cleaning and activation prior to wire bonding
    • Surface cleaning and activation prior to underfill 
    • Surface cleaning and activation prior to solder ball attach
    • Surface modification
  • Feature
    Ion bombardment design for effective surface cleaning
    Batch type design with large capacity chamber for mass production use
    Full safety system and high user-friendliness
    Customized hollow cathode for various requirement



 Plasma Solution_800 Series DM