MW-600 is a fully automatic in-line plasma processing system for panel level applications. With the working area up to 600 x 600mm, it is optimized for processing the large panel like fan-out panel or FPCB/PCB sheet.

• Application：
• Surface cleaning and activation prior to epoxy molding
• Surface cleaning and activation prior to lamination of the insulation film
• Thinning the polymer film, e.g. ABF, PI, etc.
• Residue removal of Epoxy Molding Compound (EMC) after laser drilling, plasma de-smear
• Residue removal of photoresist or polymer

• Feature：
• Microwave power supply generates high density plasma species to enhance the processing speed
• Electrode-free plasma source to eliminate the risk of electrostatic damage. (ESD)
• Pulse mode operation can reduce the processing temperature
• Loading/unloading modules selectable to accommodate AGV, conveyor or robot transfer system
• Automation, SECS/GEM, is available as an option