• PD-200W/PD-200F

PD-200W/PD-200F

6"/8" Wafer Level Plasma Dicing

Plasma cutting equipment: PD-200WA/PD-200F are fully automatic and suitable for wafer form up to 8" and iron frame types plasma cutting operations. It has the following features:
  • Features
    • Non-Scallop process: improve grain strength
    • Low temperature process: no risk of tape damage
    • Using Microwave: No ESD damage
    • Low temperature process: no risk of tape damage
    • Suitable for non-rectangular cutting
    • Can work on multiple small-sized wafers at the same time
    • Cost-effective equipment
    • Software support:
      • Data log, Error/Error recovery
      • Periodic maintenance records
      • SECS/GEM