PD-200W/PD-200F
6"/8" Wafer Level Plasma Dicing
Plasma cutting equipment: PD-200WA/PD-200F are fully automatic and suitable for wafer form up to 8" and iron frame types plasma cutting operations. It has the following features:
- Features
- Non-Scallop process: improve grain strength
- Low temperature process: no risk of tape damage
- Using Microwave: No ESD damage
- Low temperature process: no risk of tape damage
- Suitable for non-rectangular cutting
- Can work on multiple small-sized wafers at the same time
- Cost-effective equipment
- Software support:
- Data log, Error/Error recovery
- Periodic maintenance records
- SECS/GEM